JPS5444537Y2 - - Google Patents

Info

Publication number
JPS5444537Y2
JPS5444537Y2 JP1974089020U JP8902074U JPS5444537Y2 JP S5444537 Y2 JPS5444537 Y2 JP S5444537Y2 JP 1974089020 U JP1974089020 U JP 1974089020U JP 8902074 U JP8902074 U JP 8902074U JP S5444537 Y2 JPS5444537 Y2 JP S5444537Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974089020U
Other languages
Japanese (ja)
Other versions
JPS5117454U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974089020U priority Critical patent/JPS5444537Y2/ja
Publication of JPS5117454U publication Critical patent/JPS5117454U/ja
Application granted granted Critical
Publication of JPS5444537Y2 publication Critical patent/JPS5444537Y2/ja
Expired legal-status Critical Current

Links

JP1974089020U 1974-07-26 1974-07-26 Expired JPS5444537Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (cg-RX-API-DMAC7.html) 1974-07-26 1974-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (cg-RX-API-DMAC7.html) 1974-07-26 1974-07-26

Publications (2)

Publication Number Publication Date
JPS5117454U JPS5117454U (cg-RX-API-DMAC7.html) 1976-02-07
JPS5444537Y2 true JPS5444537Y2 (cg-RX-API-DMAC7.html) 1979-12-21

Family

ID=28274648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974089020U Expired JPS5444537Y2 (cg-RX-API-DMAC7.html) 1974-07-26 1974-07-26

Country Status (1)

Country Link
JP (1) JPS5444537Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587973Y2 (ja) * 1976-10-05 1983-02-12 日本電子株式会社 電子顕微鏡におけるビ−ム電流測定装置
JPS5819807Y2 (ja) * 1976-11-08 1983-04-23 富士通株式会社 反射電子検出器
JPS59161262U (ja) * 1983-04-14 1984-10-29 日本電子株式会社 絞り移動装置
JP6362253B2 (ja) * 2014-04-30 2018-07-25 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
US11335532B2 (en) 2018-03-29 2022-05-17 Hitachi High-Tech Corporation Charged particle beam device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (cg-RX-API-DMAC7.html) * 1971-10-22 1973-07-12

Also Published As

Publication number Publication date
JPS5117454U (cg-RX-API-DMAC7.html) 1976-02-07

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