JPS5443682A - Visual line control exposing machine - Google Patents
Visual line control exposing machineInfo
- Publication number
- JPS5443682A JPS5443682A JP11074977A JP11074977A JPS5443682A JP S5443682 A JPS5443682 A JP S5443682A JP 11074977 A JP11074977 A JP 11074977A JP 11074977 A JP11074977 A JP 11074977A JP S5443682 A JPS5443682 A JP S5443682A
- Authority
- JP
- Japan
- Prior art keywords
- line control
- visual line
- exposing machine
- control exposing
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11074977A JPS5443682A (en) | 1977-09-13 | 1977-09-13 | Visual line control exposing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11074977A JPS5443682A (en) | 1977-09-13 | 1977-09-13 | Visual line control exposing machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5443682A true JPS5443682A (en) | 1979-04-06 |
JPS568494B2 JPS568494B2 (en) | 1981-02-24 |
Family
ID=14543566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11074977A Granted JPS5443682A (en) | 1977-09-13 | 1977-09-13 | Visual line control exposing machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5443682A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5581946U (en) * | 1978-12-01 | 1980-06-05 | ||
JP2002367895A (en) * | 2001-06-11 | 2002-12-20 | Fuji Photo Film Co Ltd | Method and apparatus for exposing photoresist as well as substrate |
JP2010234669A (en) * | 2009-03-31 | 2010-10-21 | Fujifilm Corp | Method and device for forming fine uneven pattern |
-
1977
- 1977-09-13 JP JP11074977A patent/JPS5443682A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5581946U (en) * | 1978-12-01 | 1980-06-05 | ||
JP2002367895A (en) * | 2001-06-11 | 2002-12-20 | Fuji Photo Film Co Ltd | Method and apparatus for exposing photoresist as well as substrate |
JP2010234669A (en) * | 2009-03-31 | 2010-10-21 | Fujifilm Corp | Method and device for forming fine uneven pattern |
Also Published As
Publication number | Publication date |
---|---|
JPS568494B2 (en) | 1981-02-24 |
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