JPS5443682A - Visual line control exposing machine - Google Patents

Visual line control exposing machine

Info

Publication number
JPS5443682A
JPS5443682A JP11074977A JP11074977A JPS5443682A JP S5443682 A JPS5443682 A JP S5443682A JP 11074977 A JP11074977 A JP 11074977A JP 11074977 A JP11074977 A JP 11074977A JP S5443682 A JPS5443682 A JP S5443682A
Authority
JP
Japan
Prior art keywords
line control
visual line
exposing machine
control exposing
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11074977A
Other languages
Japanese (ja)
Other versions
JPS568494B2 (en
Inventor
Kazuhide Kuninori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP11074977A priority Critical patent/JPS5443682A/en
Publication of JPS5443682A publication Critical patent/JPS5443682A/en
Publication of JPS568494B2 publication Critical patent/JPS568494B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11074977A 1977-09-13 1977-09-13 Visual line control exposing machine Granted JPS5443682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11074977A JPS5443682A (en) 1977-09-13 1977-09-13 Visual line control exposing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11074977A JPS5443682A (en) 1977-09-13 1977-09-13 Visual line control exposing machine

Publications (2)

Publication Number Publication Date
JPS5443682A true JPS5443682A (en) 1979-04-06
JPS568494B2 JPS568494B2 (en) 1981-02-24

Family

ID=14543566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11074977A Granted JPS5443682A (en) 1977-09-13 1977-09-13 Visual line control exposing machine

Country Status (1)

Country Link
JP (1) JPS5443682A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5581946U (en) * 1978-12-01 1980-06-05
JP2002367895A (en) * 2001-06-11 2002-12-20 Fuji Photo Film Co Ltd Method and apparatus for exposing photoresist as well as substrate
JP2010234669A (en) * 2009-03-31 2010-10-21 Fujifilm Corp Method and device for forming fine uneven pattern

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5581946U (en) * 1978-12-01 1980-06-05
JP2002367895A (en) * 2001-06-11 2002-12-20 Fuji Photo Film Co Ltd Method and apparatus for exposing photoresist as well as substrate
JP2010234669A (en) * 2009-03-31 2010-10-21 Fujifilm Corp Method and device for forming fine uneven pattern

Also Published As

Publication number Publication date
JPS568494B2 (en) 1981-02-24

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