JPS5443680A - Wafer jig pulling tool - Google Patents

Wafer jig pulling tool

Info

Publication number
JPS5443680A
JPS5443680A JP10988477A JP10988477A JPS5443680A JP S5443680 A JPS5443680 A JP S5443680A JP 10988477 A JP10988477 A JP 10988477A JP 10988477 A JP10988477 A JP 10988477A JP S5443680 A JPS5443680 A JP S5443680A
Authority
JP
Japan
Prior art keywords
bar
bending part
block
edge
handle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10988477A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10988477A priority Critical patent/JPS5443680A/en
Publication of JPS5443680A publication Critical patent/JPS5443680A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent slipping out from the handle hole provided in a wafer carrying jig by providing a metallic hook block having a vertical shaking joint mechanism between a slender heat-proof bar having a bending part at the edge and a metallic bar to be the handle and constituting a pluling tool.
CONSTITUTION: L-shaped Al hook block 4 which changes the direction of bars 1 and 3 is interposed between quartz slender heat-proof bar 1 having L-shaped bending part 2 at the edge and Al metallic bar 3 to be the handle. This block 4 is constituted by L-shaped hook block main body 6 havng concave 5 at the edge and the second block 8, which is fitted to concave 5 and shakes vertically at the transverse of pin 7, and is provided with a joint function. The bending part which is provided at the edge opposite to bending part 2 of bar 1 is fitted to shaking block 8 through gum ring 9, and bar 3 is fixed to the side face of block main body 6. Thus, when the bending part 2 of bar 1 is moved while fitting to the handle hole of a wafer jig, the wafer jig is prevented from slipping out even if it shakes vertically.
COPYRIGHT: (C)1979,JPO&Japio
JP10988477A 1977-09-14 1977-09-14 Wafer jig pulling tool Pending JPS5443680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10988477A JPS5443680A (en) 1977-09-14 1977-09-14 Wafer jig pulling tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10988477A JPS5443680A (en) 1977-09-14 1977-09-14 Wafer jig pulling tool

Publications (1)

Publication Number Publication Date
JPS5443680A true JPS5443680A (en) 1979-04-06

Family

ID=14521595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10988477A Pending JPS5443680A (en) 1977-09-14 1977-09-14 Wafer jig pulling tool

Country Status (1)

Country Link
JP (1) JPS5443680A (en)

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