JPS5442718B2 - - Google Patents

Info

Publication number
JPS5442718B2
JPS5442718B2 JP3215876A JP3215876A JPS5442718B2 JP S5442718 B2 JPS5442718 B2 JP S5442718B2 JP 3215876 A JP3215876 A JP 3215876A JP 3215876 A JP3215876 A JP 3215876A JP S5442718 B2 JPS5442718 B2 JP S5442718B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3215876A
Other languages
Japanese (ja)
Other versions
JPS52115496A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3215876A priority Critical patent/JPS52115496A/ja
Publication of JPS52115496A publication Critical patent/JPS52115496A/ja
Publication of JPS5442718B2 publication Critical patent/JPS5442718B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP3215876A 1976-03-24 1976-03-24 Process and apparatus for reciprocatingly working with rockable motion Granted JPS52115496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3215876A JPS52115496A (en) 1976-03-24 1976-03-24 Process and apparatus for reciprocatingly working with rockable motion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3215876A JPS52115496A (en) 1976-03-24 1976-03-24 Process and apparatus for reciprocatingly working with rockable motion

Publications (2)

Publication Number Publication Date
JPS52115496A JPS52115496A (en) 1977-09-28
JPS5442718B2 true JPS5442718B2 (cs) 1979-12-15

Family

ID=12351110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3215876A Granted JPS52115496A (en) 1976-03-24 1976-03-24 Process and apparatus for reciprocatingly working with rockable motion

Country Status (1)

Country Link
JP (1) JPS52115496A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3337680B2 (ja) * 2000-04-12 2002-10-21 有限会社ミュウテック ワークの研磨装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5210069A (en) * 1975-07-14 1977-01-26 Seiko Epson Corp Automatic apparatus for cleaning and drying wafer

Also Published As

Publication number Publication date
JPS52115496A (en) 1977-09-28

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