JPS5442676B2 - - Google Patents
Info
- Publication number
- JPS5442676B2 JPS5442676B2 JP4411775A JP4411775A JPS5442676B2 JP S5442676 B2 JPS5442676 B2 JP S5442676B2 JP 4411775 A JP4411775 A JP 4411775A JP 4411775 A JP4411775 A JP 4411775A JP S5442676 B2 JPS5442676 B2 JP S5442676B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411775A JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411775A JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51119386A JPS51119386A (en) | 1976-10-19 |
JPS5442676B2 true JPS5442676B2 (ja) | 1979-12-15 |
Family
ID=12682652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4411775A Granted JPS51119386A (en) | 1975-04-11 | 1975-04-11 | Vacuum evapotation vessel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51119386A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5738365Y2 (ja) * | 1977-08-19 | 1982-08-24 | ||
DE4139792A1 (de) * | 1991-12-03 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Verdampferschiffchen fuer eine vorrichtung zur beschichtung von substraten |
DE19607400C2 (de) * | 1996-02-28 | 1999-09-09 | Leybold Ag | Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten |
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1975
- 1975-04-11 JP JP4411775A patent/JPS51119386A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51119386A (en) | 1976-10-19 |