JPS5442586B2 - - Google Patents
Info
- Publication number
- JPS5442586B2 JPS5442586B2 JP3418476A JP3418476A JPS5442586B2 JP S5442586 B2 JPS5442586 B2 JP S5442586B2 JP 3418476 A JP3418476 A JP 3418476A JP 3418476 A JP3418476 A JP 3418476A JP S5442586 B2 JPS5442586 B2 JP S5442586B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418476A JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3418476A JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52117576A JPS52117576A (en) | 1977-10-03 |
| JPS5442586B2 true JPS5442586B2 (zh) | 1979-12-14 |
Family
ID=12407101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3418476A Granted JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52117576A (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324420Y2 (zh) * | 1981-05-06 | 1988-07-05 |
-
1976
- 1976-03-30 JP JP3418476A patent/JPS52117576A/ja active Granted
Non-Patent Citations (1)
| Title |
|---|
| ELECTRON OPTICS AND ELECTRON MICROSCOPY=1972GB * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324420Y2 (zh) * | 1981-05-06 | 1988-07-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52117576A (en) | 1977-10-03 |