JPS52117576A - Electronic beam exposing unit - Google Patents

Electronic beam exposing unit

Info

Publication number
JPS52117576A
JPS52117576A JP3418476A JP3418476A JPS52117576A JP S52117576 A JPS52117576 A JP S52117576A JP 3418476 A JP3418476 A JP 3418476A JP 3418476 A JP3418476 A JP 3418476A JP S52117576 A JPS52117576 A JP S52117576A
Authority
JP
Japan
Prior art keywords
exposing unit
electronic beam
beam exposing
apporoximately
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3418476A
Other languages
English (en)
Other versions
JPS5442586B2 (ja
Inventor
Kohei Hori
Shuntaro Tai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3418476A priority Critical patent/JPS52117576A/ja
Publication of JPS52117576A publication Critical patent/JPS52117576A/ja
Publication of JPS5442586B2 publication Critical patent/JPS5442586B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3418476A 1976-03-30 1976-03-30 Electronic beam exposing unit Granted JPS52117576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3418476A JPS52117576A (en) 1976-03-30 1976-03-30 Electronic beam exposing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3418476A JPS52117576A (en) 1976-03-30 1976-03-30 Electronic beam exposing unit

Publications (2)

Publication Number Publication Date
JPS52117576A true JPS52117576A (en) 1977-10-03
JPS5442586B2 JPS5442586B2 (ja) 1979-12-14

Family

ID=12407101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3418476A Granted JPS52117576A (en) 1976-03-30 1976-03-30 Electronic beam exposing unit

Country Status (1)

Country Link
JP (1) JPS52117576A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324420Y2 (ja) * 1981-05-06 1988-07-05

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ELECTRON OPTICS AND ELECTRON MICROSCOPY=1972GB *

Also Published As

Publication number Publication date
JPS5442586B2 (ja) 1979-12-14

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