JPS52117576A - Electronic beam exposing unit - Google Patents
Electronic beam exposing unitInfo
- Publication number
- JPS52117576A JPS52117576A JP3418476A JP3418476A JPS52117576A JP S52117576 A JPS52117576 A JP S52117576A JP 3418476 A JP3418476 A JP 3418476A JP 3418476 A JP3418476 A JP 3418476A JP S52117576 A JPS52117576 A JP S52117576A
- Authority
- JP
- Japan
- Prior art keywords
- exposing unit
- electronic beam
- beam exposing
- apporoximately
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418476A JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418476A JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52117576A true JPS52117576A (en) | 1977-10-03 |
JPS5442586B2 JPS5442586B2 (ja) | 1979-12-14 |
Family
ID=12407101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3418476A Granted JPS52117576A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposing unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117576A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6324420Y2 (ja) * | 1981-05-06 | 1988-07-05 |
-
1976
- 1976-03-30 JP JP3418476A patent/JPS52117576A/ja active Granted
Non-Patent Citations (1)
Title |
---|
ELECTRON OPTICS AND ELECTRON MICROSCOPY=1972GB * |
Also Published As
Publication number | Publication date |
---|---|
JPS5442586B2 (ja) | 1979-12-14 |
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