JPS5442581B2 - - Google Patents
Info
- Publication number
- JPS5442581B2 JPS5442581B2 JP13175376A JP13175376A JPS5442581B2 JP S5442581 B2 JPS5442581 B2 JP S5442581B2 JP 13175376 A JP13175376 A JP 13175376A JP 13175376 A JP13175376 A JP 13175376A JP S5442581 B2 JPS5442581 B2 JP S5442581B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13175376A JPS5357752A (en) | 1976-11-04 | 1976-11-04 | Impurity deposaition method to semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13175376A JPS5357752A (en) | 1976-11-04 | 1976-11-04 | Impurity deposaition method to semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5357752A JPS5357752A (en) | 1978-05-25 |
| JPS5442581B2 true JPS5442581B2 (de) | 1979-12-14 |
Family
ID=15065375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13175376A Granted JPS5357752A (en) | 1976-11-04 | 1976-11-04 | Impurity deposaition method to semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5357752A (de) |
-
1976
- 1976-11-04 JP JP13175376A patent/JPS5357752A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5357752A (en) | 1978-05-25 |