JPS5441463B2 - - Google Patents
Info
- Publication number
- JPS5441463B2 JPS5441463B2 JP6918476A JP6918476A JPS5441463B2 JP S5441463 B2 JPS5441463 B2 JP S5441463B2 JP 6918476 A JP6918476 A JP 6918476A JP 6918476 A JP6918476 A JP 6918476A JP S5441463 B2 JPS5441463 B2 JP S5441463B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6918476A JPS52151564A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor epitaxially grown layers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6918476A JPS52151564A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor epitaxially grown layers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52151564A JPS52151564A (en) | 1977-12-16 |
| JPS5441463B2 true JPS5441463B2 (de) | 1979-12-08 |
Family
ID=13395373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6918476A Granted JPS52151564A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor epitaxially grown layers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52151564A (de) |
-
1976
- 1976-06-11 JP JP6918476A patent/JPS52151564A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52151564A (en) | 1977-12-16 |