CH593347A5 - - Google Patents
Info
- Publication number
- CH593347A5 CH593347A5 CH261776A CH261776A CH593347A5 CH 593347 A5 CH593347 A5 CH 593347A5 CH 261776 A CH261776 A CH 261776A CH 261776 A CH261776 A CH 261776A CH 593347 A5 CH593347 A5 CH 593347A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH261776A CH593347A5 (de) | 1976-03-03 | 1976-03-03 | |
DE19762612424 DE2612424A1 (de) | 1976-03-03 | 1976-03-24 | Aufdampfquelle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH261776A CH593347A5 (de) | 1976-03-03 | 1976-03-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH593347A5 true CH593347A5 (de) | 1977-11-30 |
Family
ID=4237784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH261776A CH593347A5 (de) | 1976-03-03 | 1976-03-03 |
Country Status (2)
Country | Link |
---|---|
CH (1) | CH593347A5 (de) |
DE (1) | DE2612424A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102421930A (zh) * | 2009-04-29 | 2012-04-18 | 泽瓦薄膜技术股份有限公司 | 用于通过高压蒸发进行高速率涂覆的方法和设备 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4104415C1 (de) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De | |
US6202591B1 (en) | 1998-11-12 | 2001-03-20 | Flex Products, Inc. | Linear aperture deposition apparatus and coating process |
KR100490537B1 (ko) | 2002-07-23 | 2005-05-17 | 삼성에스디아이 주식회사 | 가열용기와 이를 이용한 증착장치 |
JP2005029895A (ja) | 2003-07-04 | 2005-02-03 | Agfa Gevaert Nv | 蒸着装置 |
EP1496133A1 (de) * | 2003-07-04 | 2005-01-12 | Agfa-Gevaert | Anordnung für Tiegel zur Verdampfung von Rohstoffen |
-
1976
- 1976-03-03 CH CH261776A patent/CH593347A5/xx not_active IP Right Cessation
- 1976-03-24 DE DE19762612424 patent/DE2612424A1/de not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102421930A (zh) * | 2009-04-29 | 2012-04-18 | 泽瓦薄膜技术股份有限公司 | 用于通过高压蒸发进行高速率涂覆的方法和设备 |
CN102421930B (zh) * | 2009-04-29 | 2014-02-12 | 泽瓦薄膜技术股份有限公司 | 用于通过高压蒸发进行高速率涂覆的方法和设备 |
Also Published As
Publication number | Publication date |
---|---|
DE2612424A1 (de) | 1977-09-08 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased | ||
NE | Patent not ceased | ||
PL | Patent ceased |