JPS5440888A - Photosensitive resin composition having good storage stability - Google Patents

Photosensitive resin composition having good storage stability

Info

Publication number
JPS5440888A
JPS5440888A JP10725977A JP10725977A JPS5440888A JP S5440888 A JPS5440888 A JP S5440888A JP 10725977 A JP10725977 A JP 10725977A JP 10725977 A JP10725977 A JP 10725977A JP S5440888 A JPS5440888 A JP S5440888A
Authority
JP
Japan
Prior art keywords
group
alkyl
resin composition
photosensitive resin
storage stability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10725977A
Other languages
English (en)
Other versions
JPS6053041B2 (ja
Inventor
Yukihiro Hosaka
Yoshiyuki Harita
Mitsuo Kurokawa
Toko Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP10725977A priority Critical patent/JPS6053041B2/ja
Publication of JPS5440888A publication Critical patent/JPS5440888A/ja
Publication of JPS6053041B2 publication Critical patent/JPS6053041B2/ja
Expired legal-status Critical Current

Links

JP10725977A 1977-09-08 1977-09-08 貯蔵安定性の良好な感光性樹脂組成物 Expired JPS6053041B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10725977A JPS6053041B2 (ja) 1977-09-08 1977-09-08 貯蔵安定性の良好な感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10725977A JPS6053041B2 (ja) 1977-09-08 1977-09-08 貯蔵安定性の良好な感光性樹脂組成物

Publications (2)

Publication Number Publication Date
JPS5440888A true JPS5440888A (en) 1979-03-31
JPS6053041B2 JPS6053041B2 (ja) 1985-11-22

Family

ID=14454506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10725977A Expired JPS6053041B2 (ja) 1977-09-08 1977-09-08 貯蔵安定性の良好な感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JPS6053041B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784682A (en) * 1980-10-02 1982-05-27 Sperry Rand Corp Cathode ray tube electron beam deflection controller
JPH0551403A (ja) * 1990-11-09 1993-03-02 Nippon Shokubai Co Ltd ビニル化合物の重合防止剤および重合防止方法
JPH10274853A (ja) * 1997-03-27 1998-10-13 Tokyo Ohka Kogyo Co Ltd パターン形成方法およびこれに用いるネガ型ホトレジスト組成物
JP2016042171A (ja) * 2014-08-19 2016-03-31 信越化学工業株式会社 化学増幅レジスト材料及びパターン形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6399254U (ja) * 1986-12-19 1988-06-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5784682A (en) * 1980-10-02 1982-05-27 Sperry Rand Corp Cathode ray tube electron beam deflection controller
JPH0551403A (ja) * 1990-11-09 1993-03-02 Nippon Shokubai Co Ltd ビニル化合物の重合防止剤および重合防止方法
JPH10274853A (ja) * 1997-03-27 1998-10-13 Tokyo Ohka Kogyo Co Ltd パターン形成方法およびこれに用いるネガ型ホトレジスト組成物
JP2016042171A (ja) * 2014-08-19 2016-03-31 信越化学工業株式会社 化学増幅レジスト材料及びパターン形成方法

Also Published As

Publication number Publication date
JPS6053041B2 (ja) 1985-11-22

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