JPS5440689A - Surface defect detecting method and apparatus of substance - Google Patents
Surface defect detecting method and apparatus of substanceInfo
- Publication number
- JPS5440689A JPS5440689A JP10714877A JP10714877A JPS5440689A JP S5440689 A JPS5440689 A JP S5440689A JP 10714877 A JP10714877 A JP 10714877A JP 10714877 A JP10714877 A JP 10714877A JP S5440689 A JPS5440689 A JP S5440689A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- detecting method
- surface defect
- defect detecting
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10714877A JPS5842421B2 (en) | 1977-09-05 | 1977-09-05 | Method and device for detecting surface defects on objects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10714877A JPS5842421B2 (en) | 1977-09-05 | 1977-09-05 | Method and device for detecting surface defects on objects |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5440689A true JPS5440689A (en) | 1979-03-30 |
JPS5842421B2 JPS5842421B2 (en) | 1983-09-20 |
Family
ID=14451719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10714877A Expired JPS5842421B2 (en) | 1977-09-05 | 1977-09-05 | Method and device for detecting surface defects on objects |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5842421B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04280402A (en) * | 1991-03-07 | 1992-10-06 | Sony Tektronix Corp | Tool for adjustment |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0432496Y2 (en) * | 1984-12-27 | 1992-08-05 |
-
1977
- 1977-09-05 JP JP10714877A patent/JPS5842421B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04280402A (en) * | 1991-03-07 | 1992-10-06 | Sony Tektronix Corp | Tool for adjustment |
Also Published As
Publication number | Publication date |
---|---|
JPS5842421B2 (en) | 1983-09-20 |
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