JPS5440393B2 - - Google Patents
Info
- Publication number
- JPS5440393B2 JPS5440393B2 JP8781976A JP8781976A JPS5440393B2 JP S5440393 B2 JPS5440393 B2 JP S5440393B2 JP 8781976 A JP8781976 A JP 8781976A JP 8781976 A JP8781976 A JP 8781976A JP S5440393 B2 JPS5440393 B2 JP S5440393B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8781976A JPS5312784A (en) | 1976-07-22 | 1976-07-22 | Method and apparatus for transferring substrates in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8781976A JPS5312784A (en) | 1976-07-22 | 1976-07-22 | Method and apparatus for transferring substrates in vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5312784A JPS5312784A (en) | 1978-02-04 |
| JPS5440393B2 true JPS5440393B2 (fi) | 1979-12-03 |
Family
ID=13925565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8781976A Granted JPS5312784A (en) | 1976-07-22 | 1976-07-22 | Method and apparatus for transferring substrates in vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5312784A (fi) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5980466U (ja) * | 1982-11-20 | 1984-05-31 | ティーディーケイ株式会社 | 蒸着装置 |
| JPS60144234U (ja) * | 1984-03-05 | 1985-09-25 | 株式会社日立国際電気 | シリコン縦形エピタキシヤル成長装置 |
| DE69112350T2 (de) * | 1990-11-19 | 1996-02-08 | Nat Starch Chem Invest | Entzweigte Stärken enthaltende kosmetische Mittel. |
-
1976
- 1976-07-22 JP JP8781976A patent/JPS5312784A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5312784A (en) | 1978-02-04 |