JPS5440235B2 - - Google Patents
Info
- Publication number
- JPS5440235B2 JPS5440235B2 JP6973475A JP6973475A JPS5440235B2 JP S5440235 B2 JPS5440235 B2 JP S5440235B2 JP 6973475 A JP6973475 A JP 6973475A JP 6973475 A JP6973475 A JP 6973475A JP S5440235 B2 JPS5440235 B2 JP S5440235B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6973475A JPS51146183A (en) | 1975-06-11 | 1975-06-11 | High frequency wave ion plating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6973475A JPS51146183A (en) | 1975-06-11 | 1975-06-11 | High frequency wave ion plating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51146183A JPS51146183A (en) | 1976-12-15 |
| JPS5440235B2 true JPS5440235B2 (cs) | 1979-12-03 |
Family
ID=13411332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6973475A Granted JPS51146183A (en) | 1975-06-11 | 1975-06-11 | High frequency wave ion plating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51146183A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53100179A (en) * | 1977-02-14 | 1978-09-01 | Nippon Musical Instruments Mfg | Activationnreactive evaporation method |
| JPH0751750B2 (ja) * | 1987-05-29 | 1995-06-05 | 日新電機株式会社 | 膜形成装置 |
| JP2002220657A (ja) * | 2001-01-25 | 2002-08-09 | Kiyousera Opt Kk | 薄膜形成装置および薄膜形成方法 |
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1975
- 1975-06-11 JP JP6973475A patent/JPS51146183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51146183A (en) | 1976-12-15 |