JPS5440170B2 - - Google Patents
Info
- Publication number
- JPS5440170B2 JPS5440170B2 JP11879273A JP11879273A JPS5440170B2 JP S5440170 B2 JPS5440170 B2 JP S5440170B2 JP 11879273 A JP11879273 A JP 11879273A JP 11879273 A JP11879273 A JP 11879273A JP S5440170 B2 JPS5440170 B2 JP S5440170B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879273A JPS5440170B2 (en) | 1973-10-22 | 1973-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879273A JPS5440170B2 (en) | 1973-10-22 | 1973-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5068735A JPS5068735A (en) | 1975-06-09 |
| JPS5440170B2 true JPS5440170B2 (en) | 1979-12-01 |
Family
ID=14745200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11879273A Expired JPS5440170B2 (en) | 1973-10-22 | 1973-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5440170B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170076737A (en) | 2014-10-30 | 2017-07-04 | 니폰 제온 가부시키가이샤 | Plasma etching method |
| WO2017159511A1 (en) | 2016-03-16 | 2017-09-21 | 日本ゼオン株式会社 | Plasma etching method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH028458Y2 (en) * | 1979-02-27 | 1990-02-28 | ||
| JPH04105469A (en) * | 1990-08-24 | 1992-04-07 | Teac Corp | Video signal reproduction controller |
-
1973
- 1973-10-22 JP JP11879273A patent/JPS5440170B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170076737A (en) | 2014-10-30 | 2017-07-04 | 니폰 제온 가부시키가이샤 | Plasma etching method |
| WO2017159511A1 (en) | 2016-03-16 | 2017-09-21 | 日本ゼオン株式会社 | Plasma etching method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5068735A (en) | 1975-06-09 |