JPS5439710B2 - - Google Patents
Info
- Publication number
- JPS5439710B2 JPS5439710B2 JP10239277A JP10239277A JPS5439710B2 JP S5439710 B2 JPS5439710 B2 JP S5439710B2 JP 10239277 A JP10239277 A JP 10239277A JP 10239277 A JP10239277 A JP 10239277A JP S5439710 B2 JPS5439710 B2 JP S5439710B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10239277A JPS5436187A (en) | 1977-08-26 | 1977-08-26 | Method of forming matching marks for exposing electron beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10239277A JPS5436187A (en) | 1977-08-26 | 1977-08-26 | Method of forming matching marks for exposing electron beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5436187A JPS5436187A (en) | 1979-03-16 |
| JPS5439710B2 true JPS5439710B2 (el) | 1979-11-29 |
Family
ID=14326165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10239277A Granted JPS5436187A (en) | 1977-08-26 | 1977-08-26 | Method of forming matching marks for exposing electron beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5436187A (el) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0139912Y2 (el) * | 1983-07-01 | 1989-11-30 |
-
1977
- 1977-08-26 JP JP10239277A patent/JPS5436187A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0139912Y2 (el) * | 1983-07-01 | 1989-11-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5436187A (en) | 1979-03-16 |