JPS5438156U - - Google Patents
Info
- Publication number
- JPS5438156U JPS5438156U JP11144777U JP11144777U JPS5438156U JP S5438156 U JPS5438156 U JP S5438156U JP 11144777 U JP11144777 U JP 11144777U JP 11144777 U JP11144777 U JP 11144777U JP S5438156 U JPS5438156 U JP S5438156U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977111447U JPS5928033Y2 (ja) | 1977-08-19 | 1977-08-19 | スパツタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977111447U JPS5928033Y2 (ja) | 1977-08-19 | 1977-08-19 | スパツタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5438156U true JPS5438156U (https=) | 1979-03-13 |
| JPS5928033Y2 JPS5928033Y2 (ja) | 1984-08-14 |
Family
ID=29059304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977111447U Expired JPS5928033Y2 (ja) | 1977-08-19 | 1977-08-19 | スパツタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928033Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5196787A (https=) * | 1975-02-21 | 1976-08-25 | ||
| JPS51142050U (https=) * | 1975-05-08 | 1976-11-16 |
-
1977
- 1977-08-19 JP JP1977111447U patent/JPS5928033Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5196787A (https=) * | 1975-02-21 | 1976-08-25 | ||
| JPS51142050U (https=) * | 1975-05-08 | 1976-11-16 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5928033Y2 (ja) | 1984-08-14 |