JPS5438125U - - Google Patents

Info

Publication number
JPS5438125U
JPS5438125U JP11063877U JP11063877U JPS5438125U JP S5438125 U JPS5438125 U JP S5438125U JP 11063877 U JP11063877 U JP 11063877U JP 11063877 U JP11063877 U JP 11063877U JP S5438125 U JPS5438125 U JP S5438125U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11063877U
Other languages
Japanese (ja)
Other versions
JPS5738365Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977110638U priority Critical patent/JPS5738365Y2/ja
Publication of JPS5438125U publication Critical patent/JPS5438125U/ja
Application granted granted Critical
Publication of JPS5738365Y2 publication Critical patent/JPS5738365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1977110638U 1977-08-19 1977-08-19 Expired JPS5738365Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977110638U JPS5738365Y2 (https=) 1977-08-19 1977-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977110638U JPS5738365Y2 (https=) 1977-08-19 1977-08-19

Publications (2)

Publication Number Publication Date
JPS5438125U true JPS5438125U (https=) 1979-03-13
JPS5738365Y2 JPS5738365Y2 (https=) 1982-08-24

Family

ID=29057706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977110638U Expired JPS5738365Y2 (https=) 1977-08-19 1977-08-19

Country Status (1)

Country Link
JP (1) JPS5738365Y2 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4897741A (https=) * 1972-03-27 1973-12-12
JPS51119386A (en) * 1975-04-11 1976-10-19 Denki Kagaku Kogyo Kk Vacuum evapotation vessel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4897741A (https=) * 1972-03-27 1973-12-12
JPS51119386A (en) * 1975-04-11 1976-10-19 Denki Kagaku Kogyo Kk Vacuum evapotation vessel

Also Published As

Publication number Publication date
JPS5738365Y2 (https=) 1982-08-24

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