JPS5437471A - Code reading device for wafer - Google Patents
Code reading device for waferInfo
- Publication number
- JPS5437471A JPS5437471A JP10332677A JP10332677A JPS5437471A JP S5437471 A JPS5437471 A JP S5437471A JP 10332677 A JP10332677 A JP 10332677A JP 10332677 A JP10332677 A JP 10332677A JP S5437471 A JPS5437471 A JP S5437471A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- reading device
- code reading
- code
- codes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10332677A JPS5437471A (en) | 1977-08-29 | 1977-08-29 | Code reading device for wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10332677A JPS5437471A (en) | 1977-08-29 | 1977-08-29 | Code reading device for wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5437471A true JPS5437471A (en) | 1979-03-19 |
Family
ID=14351047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10332677A Pending JPS5437471A (en) | 1977-08-29 | 1977-08-29 | Code reading device for wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5437471A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739247U (ja) * | 1980-08-14 | 1982-03-02 | ||
JPH01170013A (ja) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | 被処理体の処理方法及び処理装置 |
-
1977
- 1977-08-29 JP JP10332677A patent/JPS5437471A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5739247U (ja) * | 1980-08-14 | 1982-03-02 | ||
JPH01170013A (ja) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | 被処理体の処理方法及び処理装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5380105A (en) | Digital signal transmission method | |
JPS5323522A (en) | Bar code reading method and its device | |
JPS51146244A (en) | Optical scanning device | |
JPS51140488A (en) | Mask alignment device | |
JPS5686306A (en) | Signal processing circuit for distance measuring device | |
JPS5437471A (en) | Code reading device for wafer | |
JPS5296827A (en) | Code reading circuit | |
JPS5433097A (en) | Semiconductor gas sensor | |
JPS53112675A (en) | Discriminator for waveform | |
JPS5238980A (en) | Temperature detection device | |
JPS52110079A (en) | Photoelectric conversion unit | |
JPS545623A (en) | Code reading device | |
JPS5344098A (en) | Detecting apparatus of upper and lower limit | |
JPS5374837A (en) | Bar code reading device | |
JPS548908A (en) | Correstion system of delay detection error | |
JPS5424662A (en) | Origin detecting device of linear moving body | |
JPS53104124A (en) | Code reader | |
JPS5370633A (en) | Optical reading system | |
JPS545323A (en) | Compensating unit for light source output variation | |
JPS5389387A (en) | Semiconductor photo detector | |
JPS53125695A (en) | Exposing method for electron rays | |
JPS52150938A (en) | Method and apparatus for code reading | |
JPS5363077A (en) | Reader for quantity of thermofluorescent rays | |
JPS5366331A (en) | Timing detector | |
JPS5337499A (en) | Measuring method for transient specific character of conveyance mechanism |