JPS54373B2 - - Google Patents

Info

Publication number
JPS54373B2
JPS54373B2 JP892775A JP892775A JPS54373B2 JP S54373 B2 JPS54373 B2 JP S54373B2 JP 892775 A JP892775 A JP 892775A JP 892775 A JP892775 A JP 892775A JP S54373 B2 JPS54373 B2 JP S54373B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP892775A
Other languages
Japanese (ja)
Other versions
JPS5191673A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP892775A priority Critical patent/JPS54373B2/ja
Publication of JPS5191673A publication Critical patent/JPS5191673A/ja
Publication of JPS54373B2 publication Critical patent/JPS54373B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP892775A 1975-01-20 1975-01-20 Expired JPS54373B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP892775A JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP892775A JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Publications (2)

Publication Number Publication Date
JPS5191673A JPS5191673A (cg-RX-API-DMAC7.html) 1976-08-11
JPS54373B2 true JPS54373B2 (cg-RX-API-DMAC7.html) 1979-01-10

Family

ID=11706281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP892775A Expired JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Country Status (1)

Country Link
JP (1) JPS54373B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581958Y2 (ja) * 1977-02-15 1983-01-13 日新ハイボルテ−ジ株式会社 イオン源部真空排気装置
US6843258B2 (en) * 2000-12-19 2005-01-18 Applied Materials, Inc. On-site cleaning gas generation for process chamber cleaning

Also Published As

Publication number Publication date
JPS5191673A (cg-RX-API-DMAC7.html) 1976-08-11

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