JPS5191673A - - Google Patents

Info

Publication number
JPS5191673A
JPS5191673A JP50008927A JP892775A JPS5191673A JP S5191673 A JPS5191673 A JP S5191673A JP 50008927 A JP50008927 A JP 50008927A JP 892775 A JP892775 A JP 892775A JP S5191673 A JPS5191673 A JP S5191673A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50008927A
Other languages
Japanese (ja)
Other versions
JPS54373B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP892775A priority Critical patent/JPS54373B2/ja
Publication of JPS5191673A publication Critical patent/JPS5191673A/ja
Publication of JPS54373B2 publication Critical patent/JPS54373B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP892775A 1975-01-20 1975-01-20 Expired JPS54373B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP892775A JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP892775A JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Publications (2)

Publication Number Publication Date
JPS5191673A true JPS5191673A (cg-RX-API-DMAC7.html) 1976-08-11
JPS54373B2 JPS54373B2 (cg-RX-API-DMAC7.html) 1979-01-10

Family

ID=11706281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP892775A Expired JPS54373B2 (cg-RX-API-DMAC7.html) 1975-01-20 1975-01-20

Country Status (1)

Country Link
JP (1) JPS54373B2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113072U (cg-RX-API-DMAC7.html) * 1977-02-15 1978-09-08
WO2002050334A3 (en) * 2000-12-19 2002-08-22 Applied Materials Inc On-site cleaning gas generation for process chamber cleaning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53113072U (cg-RX-API-DMAC7.html) * 1977-02-15 1978-09-08
WO2002050334A3 (en) * 2000-12-19 2002-08-22 Applied Materials Inc On-site cleaning gas generation for process chamber cleaning
US6843258B2 (en) 2000-12-19 2005-01-18 Applied Materials, Inc. On-site cleaning gas generation for process chamber cleaning

Also Published As

Publication number Publication date
JPS54373B2 (cg-RX-API-DMAC7.html) 1979-01-10

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