JPS5437114B2 - - Google Patents
Info
- Publication number
- JPS5437114B2 JPS5437114B2 JP11051576A JP11051576A JPS5437114B2 JP S5437114 B2 JPS5437114 B2 JP S5437114B2 JP 11051576 A JP11051576 A JP 11051576A JP 11051576 A JP11051576 A JP 11051576A JP S5437114 B2 JPS5437114 B2 JP S5437114B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11051576A JPS5334693A (en) | 1976-09-13 | 1976-09-13 | Ozone generating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11051576A JPS5334693A (en) | 1976-09-13 | 1976-09-13 | Ozone generating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5334693A JPS5334693A (en) | 1978-03-31 |
| JPS5437114B2 true JPS5437114B2 (fr) | 1979-11-13 |
Family
ID=14537739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11051576A Granted JPS5334693A (en) | 1976-09-13 | 1976-09-13 | Ozone generating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5334693A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8407857D0 (en) * | 1984-03-27 | 1984-05-02 | Mann R | Separation of gaseous mixture |
| JPS63297202A (ja) * | 1987-05-29 | 1988-12-05 | Tokyo Electron Ltd | オゾン発生方法およびその装置 |
| JPH01257103A (ja) * | 1988-04-05 | 1989-10-13 | Amatani Seisakusho:Kk | オゾン濃縮装置 |
| JP2011068560A (ja) * | 2010-10-29 | 2011-04-07 | Sumitomo Heavy Ind Ltd | オゾン濃縮装置及びオゾン濃縮装置の運転方法 |
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1976
- 1976-09-13 JP JP11051576A patent/JPS5334693A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5334693A (en) | 1978-03-31 |