JPS543638B2 - - Google Patents
Info
- Publication number
- JPS543638B2 JPS543638B2 JP8372072A JP8372072A JPS543638B2 JP S543638 B2 JPS543638 B2 JP S543638B2 JP 8372072 A JP8372072 A JP 8372072A JP 8372072 A JP8372072 A JP 8372072A JP S543638 B2 JPS543638 B2 JP S543638B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Input (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8372072A JPS543638B2 (ja) | 1972-08-23 | 1972-08-23 | |
| DE19722256617 DE2256617C3 (de) | 1971-11-19 | 1972-11-17 | Einrichtung zur Analyse einer Vorlage |
| GB5352872A GB1417721A (en) | 1971-11-19 | 1972-11-20 | Detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8372072A JPS543638B2 (ja) | 1972-08-23 | 1972-08-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940658A JPS4940658A (ja) | 1974-04-16 |
| JPS543638B2 true JPS543638B2 (ja) | 1979-02-24 |
Family
ID=13810334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8372072A Expired JPS543638B2 (ja) | 1971-11-19 | 1972-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS543638B2 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5939068B2 (ja) * | 1977-11-19 | 1984-09-20 | 富士電機株式会社 | パタ−ン処理用信号強調回路 |
| JPS57136322A (en) * | 1981-02-18 | 1982-08-23 | Hitachi Ltd | Detector for mask pattern |
| JPS58147115A (ja) * | 1982-02-26 | 1983-09-01 | Nippon Jido Seigyo Kk | パタ−ンの欠陥検査装置に用いるスライス方法 |
| JPS6049895U (ja) * | 1983-09-13 | 1985-04-08 | 株式会社フレックス | 回転歩行玩具 |
| JPH0721462B2 (ja) * | 1989-05-15 | 1995-03-08 | 新日本製鐵株式会社 | 欠陥検出方法 |
| JPH079408B2 (ja) * | 1989-05-15 | 1995-02-01 | 新日本製鐵株式会社 | 表面欠陥検出装置 |
-
1972
- 1972-08-23 JP JP8372072A patent/JPS543638B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4940658A (ja) | 1974-04-16 |