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Priority to JP50105724ApriorityCriticalpatent/JPS5229184A/ja
Publication of JPS5229184ApublicationCriticalpatent/JPS5229184A/ja
Publication of JPS5436075B2publicationCriticalpatent/JPS5436075B2/ja
H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
H10D84/65—Integrated injection logic
H10D84/652—Integrated injection logic using vertical injector structures