JPS5435140A - Etching solution of copper - Google Patents

Etching solution of copper

Info

Publication number
JPS5435140A
JPS5435140A JP10131477A JP10131477A JPS5435140A JP S5435140 A JPS5435140 A JP S5435140A JP 10131477 A JP10131477 A JP 10131477A JP 10131477 A JP10131477 A JP 10131477A JP S5435140 A JPS5435140 A JP S5435140A
Authority
JP
Japan
Prior art keywords
copper
etching solution
ammonia
hydrogen peroxide
solution containing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10131477A
Other languages
Japanese (ja)
Inventor
Shinichi Noma
Shinichi Ogo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10131477A priority Critical patent/JPS5435140A/en
Publication of JPS5435140A publication Critical patent/JPS5435140A/en
Pending legal-status Critical Current

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  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To selectively etch only copper in laminated plate composed of copper and another metal, by using water solution containing a fixed amount of ammonia and hydrogen peroxide.
COPYRIGHT: (C)1979,JPO&Japio
JP10131477A 1977-08-23 1977-08-23 Etching solution of copper Pending JPS5435140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10131477A JPS5435140A (en) 1977-08-23 1977-08-23 Etching solution of copper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10131477A JPS5435140A (en) 1977-08-23 1977-08-23 Etching solution of copper

Publications (1)

Publication Number Publication Date
JPS5435140A true JPS5435140A (en) 1979-03-15

Family

ID=14297343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10131477A Pending JPS5435140A (en) 1977-08-23 1977-08-23 Etching solution of copper

Country Status (1)

Country Link
JP (1) JPS5435140A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013491A (en) * 2007-07-09 2009-01-22 Meltex Inc Protection pattern forming method of hyperfine metallic processed product
WO2009066750A1 (en) * 2007-11-22 2009-05-28 Idemitsu Kosan Co., Ltd. Etching solution composition
JP2010255063A (en) * 2009-04-27 2010-11-11 Mitsubishi Materials Corp Etching solution for structure observation of copper or copper alloy, etching method and structure observation method
RU2548547C1 (en) * 2014-02-11 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Чувашский государственный университет имени И.И. Ульянова" Method of purifying metal surfaces from copper sediments

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009013491A (en) * 2007-07-09 2009-01-22 Meltex Inc Protection pattern forming method of hyperfine metallic processed product
WO2009066750A1 (en) * 2007-11-22 2009-05-28 Idemitsu Kosan Co., Ltd. Etching solution composition
JPWO2009066750A1 (en) * 2007-11-22 2011-04-07 出光興産株式会社 Etching solution composition
JP5642967B2 (en) * 2007-11-22 2014-12-17 関東化学株式会社 Etching solution composition
JP2010255063A (en) * 2009-04-27 2010-11-11 Mitsubishi Materials Corp Etching solution for structure observation of copper or copper alloy, etching method and structure observation method
RU2548547C1 (en) * 2014-02-11 2015-04-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Чувашский государственный университет имени И.И. Ульянова" Method of purifying metal surfaces from copper sediments

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