JPS5434685A - Manufacture of nonvolatile semiconductor memory - Google Patents
Manufacture of nonvolatile semiconductor memoryInfo
- Publication number
- JPS5434685A JPS5434685A JP10072277A JP10072277A JPS5434685A JP S5434685 A JPS5434685 A JP S5434685A JP 10072277 A JP10072277 A JP 10072277A JP 10072277 A JP10072277 A JP 10072277A JP S5434685 A JPS5434685 A JP S5434685A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor memory
- nonvolatile semiconductor
- gate electrode
- miniature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Non-Volatile Memory (AREA)
Abstract
PURPOSE:To obtain a miniature and highly integral nonvolatile memory by securing a self-matching between the floating gate electrode and the external gate electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10072277A JPS5434685A (en) | 1977-08-23 | 1977-08-23 | Manufacture of nonvolatile semiconductor memory |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10072277A JPS5434685A (en) | 1977-08-23 | 1977-08-23 | Manufacture of nonvolatile semiconductor memory |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5434685A true JPS5434685A (en) | 1979-03-14 |
Family
ID=14281513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10072277A Pending JPS5434685A (en) | 1977-08-23 | 1977-08-23 | Manufacture of nonvolatile semiconductor memory |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5434685A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788775A (en) * | 1980-11-21 | 1982-06-02 | Nec Corp | Manufacture of non volatile semiconductor memory unit |
-
1977
- 1977-08-23 JP JP10072277A patent/JPS5434685A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5788775A (en) * | 1980-11-21 | 1982-06-02 | Nec Corp | Manufacture of non volatile semiconductor memory unit |
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