JPS5433682A - Semiconductor displacement converter - Google Patents

Semiconductor displacement converter

Info

Publication number
JPS5433682A
JPS5433682A JP9949477A JP9949477A JPS5433682A JP S5433682 A JPS5433682 A JP S5433682A JP 9949477 A JP9949477 A JP 9949477A JP 9949477 A JP9949477 A JP 9949477A JP S5433682 A JPS5433682 A JP S5433682A
Authority
JP
Japan
Prior art keywords
strain
displacement converter
semiconductor
semiconductor displacement
delivery member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9949477A
Other languages
Japanese (ja)
Other versions
JPS582466B2 (en
Inventor
Yasutoshi Kurihara
Tetsuo Kosugi
Michitaka Shimayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9949477A priority Critical patent/JPS582466B2/en
Publication of JPS5433682A publication Critical patent/JPS5433682A/en
Publication of JPS582466B2 publication Critical patent/JPS582466B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To deliver the amount of displacement of the strain delivery section to the strain detector correctly, by selecting the hardness of the intermediate layer inserted between the semiconductor single crystal strain detector and the strain delivery member as 0.5 to 1.5 times that of the strain delivery member.
COPYRIGHT: (C)1979,JPO&Japio
JP9949477A 1977-08-22 1977-08-22 semiconductor displacement transducer Expired JPS582466B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9949477A JPS582466B2 (en) 1977-08-22 1977-08-22 semiconductor displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9949477A JPS582466B2 (en) 1977-08-22 1977-08-22 semiconductor displacement transducer

Publications (2)

Publication Number Publication Date
JPS5433682A true JPS5433682A (en) 1979-03-12
JPS582466B2 JPS582466B2 (en) 1983-01-17

Family

ID=14248840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9949477A Expired JPS582466B2 (en) 1977-08-22 1977-08-22 semiconductor displacement transducer

Country Status (1)

Country Link
JP (1) JPS582466B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599005A (en) * 1979-01-20 1980-07-28 Heraeus Gmbh W C Strain gauge and making method thereof
JPS5611312A (en) * 1979-07-10 1981-02-04 Hitachi Ltd Semiconductor displacement converter
JPS5642379A (en) * 1979-09-14 1981-04-20 Hitachi Ltd Semiconductor displacement transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599005A (en) * 1979-01-20 1980-07-28 Heraeus Gmbh W C Strain gauge and making method thereof
JPS5611312A (en) * 1979-07-10 1981-02-04 Hitachi Ltd Semiconductor displacement converter
JPS5642379A (en) * 1979-09-14 1981-04-20 Hitachi Ltd Semiconductor displacement transducer

Also Published As

Publication number Publication date
JPS582466B2 (en) 1983-01-17

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