JPS5433674A - Vaccum deliveryset of rotary shaft - Google Patents
Vaccum deliveryset of rotary shaftInfo
- Publication number
- JPS5433674A JPS5433674A JP9959977A JP9959977A JPS5433674A JP S5433674 A JPS5433674 A JP S5433674A JP 9959977 A JP9959977 A JP 9959977A JP 9959977 A JP9959977 A JP 9959977A JP S5433674 A JPS5433674 A JP S5433674A
- Authority
- JP
- Japan
- Prior art keywords
- rotary shaft
- deliveryset
- vaccum
- seal
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To avoid vacuum leakage even with wear seal, by forming taper section on a part of the rotary shaft, providing ring seal on it, and by pressing the seal toward the larger diameter of the taper shaft with supporting spring.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9959977A JPS5433674A (en) | 1977-08-22 | 1977-08-22 | Vaccum deliveryset of rotary shaft |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9959977A JPS5433674A (en) | 1977-08-22 | 1977-08-22 | Vaccum deliveryset of rotary shaft |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5433674A true JPS5433674A (en) | 1979-03-12 |
Family
ID=14251551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9959977A Pending JPS5433674A (en) | 1977-08-22 | 1977-08-22 | Vaccum deliveryset of rotary shaft |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5433674A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278167A (en) * | 1975-12-19 | 1977-07-01 | Sherwood Medical Ind Inc | Liquid sampling system |
JPS5742850A (en) * | 1980-08-28 | 1982-03-10 | Sekisui Chem Co Ltd | Composition for separation of serum or plasma |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4821695U (en) * | 1971-07-15 | 1973-03-12 |
-
1977
- 1977-08-22 JP JP9959977A patent/JPS5433674A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4821695U (en) * | 1971-07-15 | 1973-03-12 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5278167A (en) * | 1975-12-19 | 1977-07-01 | Sherwood Medical Ind Inc | Liquid sampling system |
JPS5742850A (en) * | 1980-08-28 | 1982-03-10 | Sekisui Chem Co Ltd | Composition for separation of serum or plasma |
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