JPS5433674A - Vaccum deliveryset of rotary shaft - Google Patents

Vaccum deliveryset of rotary shaft

Info

Publication number
JPS5433674A
JPS5433674A JP9959977A JP9959977A JPS5433674A JP S5433674 A JPS5433674 A JP S5433674A JP 9959977 A JP9959977 A JP 9959977A JP 9959977 A JP9959977 A JP 9959977A JP S5433674 A JPS5433674 A JP S5433674A
Authority
JP
Japan
Prior art keywords
rotary shaft
deliveryset
vaccum
seal
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9959977A
Other languages
Japanese (ja)
Inventor
Toshio Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9959977A priority Critical patent/JPS5433674A/en
Publication of JPS5433674A publication Critical patent/JPS5433674A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To avoid vacuum leakage even with wear seal, by forming taper section on a part of the rotary shaft, providing ring seal on it, and by pressing the seal toward the larger diameter of the taper shaft with supporting spring.
COPYRIGHT: (C)1979,JPO&Japio
JP9959977A 1977-08-22 1977-08-22 Vaccum deliveryset of rotary shaft Pending JPS5433674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9959977A JPS5433674A (en) 1977-08-22 1977-08-22 Vaccum deliveryset of rotary shaft

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9959977A JPS5433674A (en) 1977-08-22 1977-08-22 Vaccum deliveryset of rotary shaft

Publications (1)

Publication Number Publication Date
JPS5433674A true JPS5433674A (en) 1979-03-12

Family

ID=14251551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9959977A Pending JPS5433674A (en) 1977-08-22 1977-08-22 Vaccum deliveryset of rotary shaft

Country Status (1)

Country Link
JP (1) JPS5433674A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278167A (en) * 1975-12-19 1977-07-01 Sherwood Medical Ind Inc Liquid sampling system
JPS5742850A (en) * 1980-08-28 1982-03-10 Sekisui Chem Co Ltd Composition for separation of serum or plasma

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4821695U (en) * 1971-07-15 1973-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4821695U (en) * 1971-07-15 1973-03-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278167A (en) * 1975-12-19 1977-07-01 Sherwood Medical Ind Inc Liquid sampling system
JPS5742850A (en) * 1980-08-28 1982-03-10 Sekisui Chem Co Ltd Composition for separation of serum or plasma

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