JPS5433512B2 - - Google Patents
Info
- Publication number
- JPS5433512B2 JPS5433512B2 JP5058772A JP5058772A JPS5433512B2 JP S5433512 B2 JPS5433512 B2 JP S5433512B2 JP 5058772 A JP5058772 A JP 5058772A JP 5058772 A JP5058772 A JP 5058772A JP S5433512 B2 JPS5433512 B2 JP S5433512B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5058772A JPS5433512B2 (es) | 1972-05-22 | 1972-05-22 | |
| GB2093373A GB1363618A (en) | 1972-05-22 | 1973-05-02 | Electron gun |
| US00361180A US3857055A (en) | 1972-05-22 | 1973-05-17 | Electron gun for electron irradiation equipment |
| FR7318387A FR2185854B1 (es) | 1972-05-22 | 1973-05-21 | |
| DE2325993A DE2325993C3 (de) | 1972-05-22 | 1973-05-22 | Elektronenkanone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5058772A JPS5433512B2 (es) | 1972-05-22 | 1972-05-22 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3363979A Division JPS551077A (en) | 1979-03-22 | 1979-03-22 | Electron gun for electron irradiator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917166A JPS4917166A (es) | 1974-02-15 |
| JPS5433512B2 true JPS5433512B2 (es) | 1979-10-20 |
Family
ID=12863092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5058772A Expired JPS5433512B2 (es) | 1972-05-22 | 1972-05-22 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3857055A (es) |
| JP (1) | JPS5433512B2 (es) |
| DE (1) | DE2325993C3 (es) |
| FR (1) | FR2185854B1 (es) |
| GB (1) | GB1363618A (es) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS528595A (en) * | 1975-07-09 | 1977-01-22 | Matsushita Electric Ind Co Ltd | Electron gun for electronic beam processing machines |
| JPS52154150U (es) * | 1976-05-19 | 1977-11-22 | ||
| DE3169011D1 (en) * | 1980-05-31 | 1985-03-28 | Bl Tech Ltd | Control systems for continuously variable ratio transmissions |
| GB8332237D0 (en) * | 1983-12-02 | 1984-01-11 | Leyland Vehicles | Transmission system |
| GB8900210D0 (en) * | 1989-01-06 | 1989-03-08 | Fellows Thomas G | Improvements in or relating to drivelines for wheeled vehicles |
| DE59010590D1 (de) * | 1989-09-09 | 1997-01-16 | Ptr Praezisionstech Gmbh | Katodenhalter für einen Elektronenstrahlerzeuger |
| DE3930202A1 (de) * | 1989-09-09 | 1991-03-14 | Ptr Praezisionstech Gmbh | Elektronenstrahlerzeuger fuer eine elektronenstrahlkanone |
| US5376792A (en) * | 1993-04-26 | 1994-12-27 | Rj Lee Group, Inc. | Scanning electron microscope |
| EP2556525B1 (de) * | 2010-04-09 | 2018-08-22 | GE Sensing & Inspection Technologies GmbH | Mikrofokus-röntgenröhre mit kathodenelement und verfahren damit |
| US10807187B2 (en) * | 2015-09-24 | 2020-10-20 | Arcam Ab | X-ray calibration standard object |
| JP6741879B2 (ja) * | 2017-04-11 | 2020-08-19 | エーエスエムエル ネザーランズ ビー．ブイ． | 荷電粒子源モジュール、荷電粒子源モジュールを備えた露光システム、荷電粒子源配置、半導体デバイスを製造する方法、及びターゲットを検査する方法 |
| KR102120946B1 (ko) * | 2018-11-16 | 2020-06-10 | (주)엠크래프츠 | 전자빔 자동정렬구조가 구비된 전자현미경 |
| CN110556279A (zh) * | 2019-08-13 | 2019-12-10 | 河南河大科技发展有限公司 | 一种阴极电子枪灯丝装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2639397A (en) * | 1949-06-04 | 1953-05-19 | Collins Radio Co | Vacuum gauge of the ionization producing type |
| US2932755A (en) * | 1956-01-30 | 1960-04-12 | Applied Radiation Corp | Electron gun and cathode |
| US3187216A (en) * | 1961-05-12 | 1965-06-01 | Welding Research Inc | Electron gun having a releasably clamped electron emitting element |
| US3263109A (en) * | 1961-07-24 | 1966-07-26 | Siemens Ag | Electron source for corpuscular radiation apparatus operating on a pump including an indirectly heated cathode |
| US3368163A (en) * | 1964-05-28 | 1968-02-06 | Sylvania Electric Prod | Ruggedized high frequency apparatus |
| US3358174A (en) * | 1964-12-18 | 1967-12-12 | Gen Electric | Electron gun having a segmented control electrode |
| CH491495A (de) * | 1968-05-15 | 1970-05-31 | Eidophor Ag | Kathodenstrahlerzeugungssystem mit auswechselbarer Kathode |
| US3601651A (en) * | 1970-01-09 | 1971-08-24 | Motorola Inc | Replacement cathode assembly |
-
1972
- 1972-05-22 JP JP5058772A patent/JPS5433512B2/ja not_active Expired
-
1973
- 1973-05-02 GB GB2093373A patent/GB1363618A/en not_active Expired
- 1973-05-17 US US00361180A patent/US3857055A/en not_active Expired - Lifetime
- 1973-05-21 FR FR7318387A patent/FR2185854B1/fr not_active Expired
- 1973-05-22 DE DE2325993A patent/DE2325993C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2325993B2 (de) | 1975-04-24 |
| FR2185854A1 (es) | 1974-01-04 |
| US3857055A (en) | 1974-12-24 |
| DE2325993A1 (de) | 1973-12-06 |
| JPS4917166A (es) | 1974-02-15 |
| DE2325993C3 (de) | 1981-10-15 |
| FR2185854B1 (es) | 1977-02-18 |
| GB1363618A (en) | 1974-08-14 |