JPS5431472B2 - - Google Patents

Info

Publication number
JPS5431472B2
JPS5431472B2 JP545172A JP545172A JPS5431472B2 JP S5431472 B2 JPS5431472 B2 JP S5431472B2 JP 545172 A JP545172 A JP 545172A JP 545172 A JP545172 A JP 545172A JP S5431472 B2 JPS5431472 B2 JP S5431472B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP545172A
Other languages
Japanese (ja)
Other versions
JPS4874483A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP545172A priority Critical patent/JPS5431472B2/ja
Publication of JPS4874483A publication Critical patent/JPS4874483A/ja
Publication of JPS5431472B2 publication Critical patent/JPS5431472B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP545172A 1972-01-10 1972-01-10 Expired JPS5431472B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP545172A JPS5431472B2 (en:Method) 1972-01-10 1972-01-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP545172A JPS5431472B2 (en:Method) 1972-01-10 1972-01-10

Publications (2)

Publication Number Publication Date
JPS4874483A JPS4874483A (en:Method) 1973-10-06
JPS5431472B2 true JPS5431472B2 (en:Method) 1979-10-06

Family

ID=11611559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP545172A Expired JPS5431472B2 (en:Method) 1972-01-10 1972-01-10

Country Status (1)

Country Link
JP (1) JPS5431472B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148424A (ja) * 1982-02-26 1983-09-03 Sony Corp 気相成長法
JPH02244712A (ja) * 1989-03-17 1990-09-28 Sony Corp プラズマ装置

Also Published As

Publication number Publication date
JPS4874483A (en:Method) 1973-10-06

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