JPS5431471B2 - - Google Patents
Info
- Publication number
- JPS5431471B2 JPS5431471B2 JP2154872A JP2154872A JPS5431471B2 JP S5431471 B2 JPS5431471 B2 JP S5431471B2 JP 2154872 A JP2154872 A JP 2154872A JP 2154872 A JP2154872 A JP 2154872A JP S5431471 B2 JPS5431471 B2 JP S5431471B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2154872A JPS5431471B2 (de) | 1972-03-03 | 1972-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2154872A JPS5431471B2 (de) | 1972-03-03 | 1972-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4889887A JPS4889887A (de) | 1973-11-24 |
| JPS5431471B2 true JPS5431471B2 (de) | 1979-10-06 |
Family
ID=12058026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2154872A Expired JPS5431471B2 (de) | 1972-03-03 | 1972-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5431471B2 (de) |
-
1972
- 1972-03-03 JP JP2154872A patent/JPS5431471B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4889887A (de) | 1973-11-24 |