JPS4889887A - - Google Patents

Info

Publication number
JPS4889887A
JPS4889887A JP2154872A JP2154872A JPS4889887A JP S4889887 A JPS4889887 A JP S4889887A JP 2154872 A JP2154872 A JP 2154872A JP 2154872 A JP2154872 A JP 2154872A JP S4889887 A JPS4889887 A JP S4889887A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2154872A
Other languages
Japanese (ja)
Other versions
JPS5431471B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2154872A priority Critical patent/JPS5431471B2/ja
Publication of JPS4889887A publication Critical patent/JPS4889887A/ja
Publication of JPS5431471B2 publication Critical patent/JPS5431471B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2154872A 1972-03-03 1972-03-03 Expired JPS5431471B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2154872A JPS5431471B2 (de) 1972-03-03 1972-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2154872A JPS5431471B2 (de) 1972-03-03 1972-03-03

Publications (2)

Publication Number Publication Date
JPS4889887A true JPS4889887A (de) 1973-11-24
JPS5431471B2 JPS5431471B2 (de) 1979-10-06

Family

ID=12058026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2154872A Expired JPS5431471B2 (de) 1972-03-03 1972-03-03

Country Status (1)

Country Link
JP (1) JPS5431471B2 (de)

Also Published As

Publication number Publication date
JPS5431471B2 (de) 1979-10-06

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