JPS5430880A - Minute vibration measuring apparatus - Google Patents

Minute vibration measuring apparatus

Info

Publication number
JPS5430880A
JPS5430880A JP9161177A JP9161177A JPS5430880A JP S5430880 A JPS5430880 A JP S5430880A JP 9161177 A JP9161177 A JP 9161177A JP 9161177 A JP9161177 A JP 9161177A JP S5430880 A JPS5430880 A JP S5430880A
Authority
JP
Japan
Prior art keywords
minute vibration
measuring apparatus
vibration measuring
vibrations
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9161177A
Other languages
English (en)
Other versions
JPS5856094B2 (ja
Inventor
Yasutomo Fujimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP52091611A priority Critical patent/JPS5856094B2/ja
Publication of JPS5430880A publication Critical patent/JPS5430880A/ja
Publication of JPS5856094B2 publication Critical patent/JPS5856094B2/ja
Expired legal-status Critical Current

Links

JP52091611A 1977-07-30 1977-07-30 微小振動測定装置 Expired JPS5856094B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52091611A JPS5856094B2 (ja) 1977-07-30 1977-07-30 微小振動測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52091611A JPS5856094B2 (ja) 1977-07-30 1977-07-30 微小振動測定装置

Publications (2)

Publication Number Publication Date
JPS5430880A true JPS5430880A (en) 1979-03-07
JPS5856094B2 JPS5856094B2 (ja) 1983-12-13

Family

ID=14031356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52091611A Expired JPS5856094B2 (ja) 1977-07-30 1977-07-30 微小振動測定装置

Country Status (1)

Country Link
JP (1) JPS5856094B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1431729A1 (de) * 2002-12-20 2004-06-23 Esec Trading S.A. Einrichtung zur Messung der Schwingungsamplitude der Spitze einer Kapillare
US6931932B2 (en) 2002-12-20 2005-08-23 Esec Trading Sa Device for measuring the amplitude of the tip of an oscillating capillary
JP2006140210A (ja) * 2004-11-10 2006-06-01 Disco Abrasive Syst Ltd 超音波振動切削装置，振幅測定方法
DE102015217200A1 (de) * 2015-09-09 2017-03-09 Sauer Gmbh Verfahren und Vorrichtung zum Bestimmen einer Schwingungsamplitude eines Werkzeugs
JP2017510798A (ja) * 2014-03-07 2017-04-13 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ ワイヤボンダのキャピラリの振動振幅を測定するための装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1431729A1 (de) * 2002-12-20 2004-06-23 Esec Trading S.A. Einrichtung zur Messung der Schwingungsamplitude der Spitze einer Kapillare
US6931932B2 (en) 2002-12-20 2005-08-23 Esec Trading Sa Device for measuring the amplitude of the tip of an oscillating capillary
JP2006140210A (ja) * 2004-11-10 2006-06-01 Disco Abrasive Syst Ltd 超音波振動切削装置，振幅測定方法
JP4549818B2 (ja) * 2004-11-10 2010-09-22 株式会社ディスコ 振幅測定方法
JP2017510798A (ja) * 2014-03-07 2017-04-13 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ ワイヤボンダのキャピラリの振動振幅を測定するための装置
DE102015217200A1 (de) * 2015-09-09 2017-03-09 Sauer Gmbh Verfahren und Vorrichtung zum Bestimmen einer Schwingungsamplitude eines Werkzeugs
JP2018532600A (ja) * 2015-09-09 2018-11-08 ザウアー ゲーエムベーハーＳＡＵＥＲ ＧｍｂＨ 工作ツールの振動振幅を求めるための方法及び装置
RU2719333C2 (ru) * 2015-09-09 2020-04-17 Зауер Гмбх Способ и устройство для определения амплитуды колебаний инструмента
US10821568B2 (en) 2015-09-09 2020-11-03 Sauer Gmbh Method and device for determining a vibration amplitude of a tool

Also Published As

Publication number Publication date
JPS5856094B2 (ja) 1983-12-13

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