JPS5354050A - Method of detecting error of relative position - Google Patents

Method of detecting error of relative position

Info

Publication number
JPS5354050A
JPS5354050A JP12903476A JP12903476A JPS5354050A JP S5354050 A JPS5354050 A JP S5354050A JP 12903476 A JP12903476 A JP 12903476A JP 12903476 A JP12903476 A JP 12903476A JP S5354050 A JPS5354050 A JP S5354050A
Authority
JP
Japan
Prior art keywords
relative position
detecting error
measuring
vibrating
enhance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12903476A
Other languages
Japanese (ja)
Inventor
Masao Hiyane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12903476A priority Critical patent/JPS5354050A/en
Publication of JPS5354050A publication Critical patent/JPS5354050A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enhance the measuring accuracy of this method compared with a vibration slitting process by measuring a gauge plate with respect to a work to be processed as to the relative displacement therebetween by measuring them without vibrating them.
COPYRIGHT: (C)1978,JPO&Japio
JP12903476A 1976-10-27 1976-10-27 Method of detecting error of relative position Pending JPS5354050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12903476A JPS5354050A (en) 1976-10-27 1976-10-27 Method of detecting error of relative position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12903476A JPS5354050A (en) 1976-10-27 1976-10-27 Method of detecting error of relative position

Publications (1)

Publication Number Publication Date
JPS5354050A true JPS5354050A (en) 1978-05-17

Family

ID=14999465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12903476A Pending JPS5354050A (en) 1976-10-27 1976-10-27 Method of detecting error of relative position

Country Status (1)

Country Link
JP (1) JPS5354050A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155323A (en) * 1979-05-23 1980-12-03 Thomson Csf Digital controlled optical strength modulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155323A (en) * 1979-05-23 1980-12-03 Thomson Csf Digital controlled optical strength modulator
JPH0435732B2 (en) * 1979-05-23 1992-06-12 Thomson Csf

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