JPS5354050A - Method of detecting error of relative position - Google Patents
Method of detecting error of relative positionInfo
- Publication number
- JPS5354050A JPS5354050A JP12903476A JP12903476A JPS5354050A JP S5354050 A JPS5354050 A JP S5354050A JP 12903476 A JP12903476 A JP 12903476A JP 12903476 A JP12903476 A JP 12903476A JP S5354050 A JPS5354050 A JP S5354050A
- Authority
- JP
- Japan
- Prior art keywords
- relative position
- detecting error
- measuring
- vibrating
- enhance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance the measuring accuracy of this method compared with a vibration slitting process by measuring a gauge plate with respect to a work to be processed as to the relative displacement therebetween by measuring them without vibrating them.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12903476A JPS5354050A (en) | 1976-10-27 | 1976-10-27 | Method of detecting error of relative position |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12903476A JPS5354050A (en) | 1976-10-27 | 1976-10-27 | Method of detecting error of relative position |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5354050A true JPS5354050A (en) | 1978-05-17 |
Family
ID=14999465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12903476A Pending JPS5354050A (en) | 1976-10-27 | 1976-10-27 | Method of detecting error of relative position |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5354050A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55155323A (en) * | 1979-05-23 | 1980-12-03 | Thomson Csf | Digital controlled optical strength modulator |
-
1976
- 1976-10-27 JP JP12903476A patent/JPS5354050A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55155323A (en) * | 1979-05-23 | 1980-12-03 | Thomson Csf | Digital controlled optical strength modulator |
JPH0435732B2 (en) * | 1979-05-23 | 1992-06-12 | Thomson Csf |
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