JPS5429409B2 - - Google Patents

Info

Publication number
JPS5429409B2
JPS5429409B2 JP15056075A JP15056075A JPS5429409B2 JP S5429409 B2 JPS5429409 B2 JP S5429409B2 JP 15056075 A JP15056075 A JP 15056075A JP 15056075 A JP15056075 A JP 15056075A JP S5429409 B2 JPS5429409 B2 JP S5429409B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15056075A
Other versions
JPS5274580A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50150560A priority Critical patent/JPS5274580A/ja
Priority to GB34335/76A priority patent/GB1517085A/en
Priority to US05/715,716 priority patent/US4043748A/en
Priority to DE2647011A priority patent/DE2647011C3/de
Publication of JPS5274580A publication Critical patent/JPS5274580A/ja
Publication of JPS5429409B2 publication Critical patent/JPS5429409B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP50150560A 1975-12-12 1975-12-19 Boat for vacuum evaporation Granted JPS5274580A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP50150560A JPS5274580A (en) 1975-12-19 1975-12-19 Boat for vacuum evaporation
GB34335/76A GB1517085A (en) 1975-12-19 1976-08-18 Evaporation boat for use in vapour deposition
US05/715,716 US4043748A (en) 1975-12-12 1976-08-19 Evaporation boats for use in vapor deposition
DE2647011A DE2647011C3 (de) 1975-12-19 1976-10-18 Verdampfungsschiffchen für Verdampfungsstände

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50150560A JPS5274580A (en) 1975-12-19 1975-12-19 Boat for vacuum evaporation

Publications (2)

Publication Number Publication Date
JPS5274580A JPS5274580A (en) 1977-06-22
JPS5429409B2 true JPS5429409B2 (ja) 1979-09-22

Family

ID=15499536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50150560A Granted JPS5274580A (en) 1975-12-12 1975-12-19 Boat for vacuum evaporation

Country Status (4)

Country Link
US (1) US4043748A (ja)
JP (1) JPS5274580A (ja)
DE (1) DE2647011C3 (ja)
GB (1) GB1517085A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0110535Y2 (ja) * 1982-06-25 1989-03-27
JP4502738B2 (ja) * 2004-07-29 2010-07-14 京セラ株式会社 蒸着用ボート
US11133571B2 (en) 2015-10-05 2021-09-28 Samsung Electronics Co., Ltd Electronic apparatus and control method therefor

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4089643A (en) * 1976-03-19 1978-05-16 Gte Sylvania Incorporated Self-resistance-heated evaporation boat
GB8720415D0 (en) * 1987-08-28 1987-10-07 Vg Instr Group Vacuum evaporation & deposition
EP0386247A4 (en) * 1988-05-31 1990-12-05 Kievsky Politekhnichesky Institut Imeni 50-Letia Velikoi Oktyabrskoi Sotsialisticheskoi Revoljutsii Device for vacuum deposition of films
CH676635A5 (ja) * 1989-01-26 1991-02-15 Balzers Hochvakuum
US5395180A (en) * 1993-12-14 1995-03-07 Advanced Ceramics Corporation Boron nitride vaporization vessel
US5951769A (en) 1997-06-04 1999-09-14 Crown Roll Leaf, Inc. Method and apparatus for making high refractive index (HRI) film
DE19735814A1 (de) * 1997-08-18 1999-02-25 Kempten Elektroschmelz Gmbh Keramische Flash-TV-Verdampfer
DE19823908A1 (de) * 1998-05-28 1999-12-02 Kempten Elektroschmelz Gmbh Elliptischer keramischer Verdampfer
DE102005030862B4 (de) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
US20100285218A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
WO2011065998A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
CN102366835B (zh) * 2011-09-01 2013-10-30 四川科力特硬质合金股份有限公司 一种控制硬质合金喇叭嘴长管材烧结弯曲变形的异形舟皿
CN102366834B (zh) * 2011-09-01 2013-10-30 四川科力特硬质合金股份有限公司 一种控制硬质合金长台阶棒材与管材烧结弯曲变形的异形舟皿
CN102398037A (zh) * 2011-10-21 2012-04-04 四川科力特硬质合金股份有限公司 控制硬质合金喇叭状材料烧结变形的异形舟皿

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US454759A (en) * 1891-06-23 Ore-roasting dish
US3452970A (en) * 1967-05-12 1969-07-01 Siemens Ag Vaporization vessel for use in vapor deposition upon a carrier support
US3746502A (en) * 1971-12-20 1973-07-17 Xerox Corp Evaporation crucible
DE2449225C3 (de) * 1974-10-16 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Verdampfungstiegel für Vakuumbedampfungs anlagen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0110535Y2 (ja) * 1982-06-25 1989-03-27
JP4502738B2 (ja) * 2004-07-29 2010-07-14 京セラ株式会社 蒸着用ボート
US11133571B2 (en) 2015-10-05 2021-09-28 Samsung Electronics Co., Ltd Electronic apparatus and control method therefor

Also Published As

Publication number Publication date
DE2647011C3 (de) 1979-10-31
DE2647011B2 (de) 1979-03-08
JPS5274580A (en) 1977-06-22
GB1517085A (en) 1978-07-12
DE2647011A1 (de) 1977-06-30
US4043748A (en) 1977-08-23

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