JPS5429147B2 - - Google Patents
Info
- Publication number
- JPS5429147B2 JPS5429147B2 JP10923374A JP10923374A JPS5429147B2 JP S5429147 B2 JPS5429147 B2 JP S5429147B2 JP 10923374 A JP10923374 A JP 10923374A JP 10923374 A JP10923374 A JP 10923374A JP S5429147 B2 JPS5429147 B2 JP S5429147B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923374A JPS5429147B2 (enExample) | 1974-09-20 | 1974-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10923374A JPS5429147B2 (enExample) | 1974-09-20 | 1974-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5136375A JPS5136375A (enExample) | 1976-03-27 |
| JPS5429147B2 true JPS5429147B2 (enExample) | 1979-09-21 |
Family
ID=14504978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10923374A Expired JPS5429147B2 (enExample) | 1974-09-20 | 1974-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5429147B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4182386A (en) * | 1977-11-30 | 1980-01-08 | Semi-Bulk Systems, Inc. | Closed system and container for dust free loading and unloading of powdered materials |
| JPS5618383U (enExample) * | 1979-07-20 | 1981-02-18 | ||
| KR101004434B1 (ko) | 2008-11-26 | 2010-12-28 | 세메스 주식회사 | 기판 지지 유닛과, 이를 이용한 기판 연마 장치 및 방법 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS3730807Y1 (enExample) * | 1960-12-28 | 1962-11-19 | ||
| JPS423749Y1 (enExample) * | 1966-07-06 | 1967-03-03 |
-
1974
- 1974-09-20 JP JP10923374A patent/JPS5429147B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5136375A (enExample) | 1976-03-27 |