JPS5428381B2 - - Google Patents

Info

Publication number
JPS5428381B2
JPS5428381B2 JP13955476A JP13955476A JPS5428381B2 JP S5428381 B2 JPS5428381 B2 JP S5428381B2 JP 13955476 A JP13955476 A JP 13955476A JP 13955476 A JP13955476 A JP 13955476A JP S5428381 B2 JPS5428381 B2 JP S5428381B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13955476A
Other languages
Japanese (ja)
Other versions
JPS5364636A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13955476A priority Critical patent/JPS5364636A/ja
Publication of JPS5364636A publication Critical patent/JPS5364636A/ja
Publication of JPS5428381B2 publication Critical patent/JPS5428381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP13955476A 1976-11-22 1976-11-22 Dry etching device Granted JPS5364636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13955476A JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13955476A JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Publications (2)

Publication Number Publication Date
JPS5364636A JPS5364636A (en) 1978-06-09
JPS5428381B2 true JPS5428381B2 (US07655746-20100202-C00011.png) 1979-09-17

Family

ID=15247959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13955476A Granted JPS5364636A (en) 1976-11-22 1976-11-22 Dry etching device

Country Status (1)

Country Link
JP (1) JPS5364636A (US07655746-20100202-C00011.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310537B2 (US07655746-20100202-C00011.png) * 1980-08-27 1991-02-13 Saint Gobain Vitrage

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5625972A (en) * 1979-08-09 1981-03-12 Fujitsu Ltd Etching treatment by plasma
JPS57154147U (US07655746-20100202-C00011.png) * 1981-03-20 1982-09-28
JPS57169241A (en) * 1981-04-13 1982-10-18 Oki Electric Ind Co Ltd Dry etching method
JPS58225638A (ja) * 1982-06-24 1983-12-27 Toshiba Corp エッチング終点検出方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104268A (ja) * 1975-03-12 1976-09-14 Fujitsu Ltd Etsuchingusochinoseigyohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51104268A (ja) * 1975-03-12 1976-09-14 Fujitsu Ltd Etsuchingusochinoseigyohoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310537B2 (US07655746-20100202-C00011.png) * 1980-08-27 1991-02-13 Saint Gobain Vitrage

Also Published As

Publication number Publication date
JPS5364636A (en) 1978-06-09

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