JPS5428371U - - Google Patents

Info

Publication number
JPS5428371U
JPS5428371U JP10157077U JP10157077U JPS5428371U JP S5428371 U JPS5428371 U JP S5428371U JP 10157077 U JP10157077 U JP 10157077U JP 10157077 U JP10157077 U JP 10157077U JP S5428371 U JPS5428371 U JP S5428371U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10157077U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10157077U priority Critical patent/JPS5428371U/ja
Publication of JPS5428371U publication Critical patent/JPS5428371U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10157077U 1977-07-28 1977-07-28 Pending JPS5428371U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10157077U JPS5428371U (en:Method) 1977-07-28 1977-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10157077U JPS5428371U (en:Method) 1977-07-28 1977-07-28

Publications (1)

Publication Number Publication Date
JPS5428371U true JPS5428371U (en:Method) 1979-02-24

Family

ID=29040320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10157077U Pending JPS5428371U (en:Method) 1977-07-28 1977-07-28

Country Status (1)

Country Link
JP (1) JPS5428371U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136320A (en) * 1981-02-17 1982-08-23 Toshiba Corp Exchanger for sample in electron-ray drawing device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914102A (en:Method) * 1972-05-16 1974-02-07
JPS5212580A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Ion shooting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914102A (en:Method) * 1972-05-16 1974-02-07
JPS5212580A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Ion shooting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136320A (en) * 1981-02-17 1982-08-23 Toshiba Corp Exchanger for sample in electron-ray drawing device

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