JPS5428273B2 - - Google Patents
Info
- Publication number
- JPS5428273B2 JPS5428273B2 JP15607176A JP15607176A JPS5428273B2 JP S5428273 B2 JPS5428273 B2 JP S5428273B2 JP 15607176 A JP15607176 A JP 15607176A JP 15607176 A JP15607176 A JP 15607176A JP S5428273 B2 JPS5428273 B2 JP S5428273B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15607176A JPS5379473A (en) | 1976-12-24 | 1976-12-24 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15607176A JPS5379473A (en) | 1976-12-24 | 1976-12-24 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5379473A JPS5379473A (en) | 1978-07-13 |
| JPS5428273B2 true JPS5428273B2 (cs) | 1979-09-14 |
Family
ID=15619658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15607176A Granted JPS5379473A (en) | 1976-12-24 | 1976-12-24 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5379473A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57133645A (en) * | 1981-02-12 | 1982-08-18 | Fujitsu Ltd | Semiconductor integrated circuit device and manufacture thereof |
| JPS57162444A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Manufacture of semiconductor device |
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1976
- 1976-12-24 JP JP15607176A patent/JPS5379473A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5379473A (en) | 1978-07-13 |