JPS5427116B2 - - Google Patents

Info

Publication number
JPS5427116B2
JPS5427116B2 JP1267873A JP1267873A JPS5427116B2 JP S5427116 B2 JPS5427116 B2 JP S5427116B2 JP 1267873 A JP1267873 A JP 1267873A JP 1267873 A JP1267873 A JP 1267873A JP S5427116 B2 JPS5427116 B2 JP S5427116B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1267873A
Other languages
Japanese (ja)
Other versions
JPS49101812A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1267873A priority Critical patent/JPS5427116B2/ja
Publication of JPS49101812A publication Critical patent/JPS49101812A/ja
Publication of JPS5427116B2 publication Critical patent/JPS5427116B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1267873A 1973-01-31 1973-01-31 Expired JPS5427116B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Publications (2)

Publication Number Publication Date
JPS49101812A JPS49101812A (enrdf_load_stackoverflow) 1974-09-26
JPS5427116B2 true JPS5427116B2 (enrdf_load_stackoverflow) 1979-09-07

Family

ID=11812022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267873A Expired JPS5427116B2 (enrdf_load_stackoverflow) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS5427116B2 (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2223865B1 (enrdf_load_stackoverflow) * 1973-03-27 1978-10-20 Thomson Csf
JPS5218337A (en) * 1975-08-01 1977-02-10 Sony Corp Optical unit
JPS5394580U (enrdf_load_stackoverflow) * 1976-12-29 1978-08-01
JPS53147668U (enrdf_load_stackoverflow) * 1977-04-26 1978-11-20
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS5850008A (ja) * 1981-09-21 1983-03-24 Toshiba Corp 高精度移動テ−ブル装置
JPH06105416B2 (ja) * 1985-10-14 1994-12-21 株式会社日立製作所 多自由度空間微動機構
JPS62145309A (ja) * 1985-12-20 1987-06-29 Canon Inc 精密送り装置
JPH071460B2 (ja) * 1987-03-30 1995-01-11 工業技術院長 圧電素子を用いた変位制御機構
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置

Also Published As

Publication number Publication date
JPS49101812A (enrdf_load_stackoverflow) 1974-09-26

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