JPS5425896A - Production of thin-film type gas detecting element - Google Patents

Production of thin-film type gas detecting element

Info

Publication number
JPS5425896A
JPS5425896A JP9187377A JP9187377A JPS5425896A JP S5425896 A JPS5425896 A JP S5425896A JP 9187377 A JP9187377 A JP 9187377A JP 9187377 A JP9187377 A JP 9187377A JP S5425896 A JPS5425896 A JP S5425896A
Authority
JP
Japan
Prior art keywords
thin
detecting element
gas detecting
production
film type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9187377A
Other languages
Japanese (ja)
Inventor
Teizo Takahama
Toyoki Kazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP9187377A priority Critical patent/JPS5425896A/en
Publication of JPS5425896A publication Critical patent/JPS5425896A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To miniaturize and obtain a gas detecting element of the type of directly drawing out the resistance change of the low resistance region of a thin-film by forming the thin-film between resistance-drawing-out electrodes then forming lead-wire-mounting electrodes on said electrodes.
COPYRIGHT: (C)1979,JPO&Japio
JP9187377A 1977-07-29 1977-07-29 Production of thin-film type gas detecting element Pending JPS5425896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9187377A JPS5425896A (en) 1977-07-29 1977-07-29 Production of thin-film type gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9187377A JPS5425896A (en) 1977-07-29 1977-07-29 Production of thin-film type gas detecting element

Publications (1)

Publication Number Publication Date
JPS5425896A true JPS5425896A (en) 1979-02-27

Family

ID=14038668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9187377A Pending JPS5425896A (en) 1977-07-29 1977-07-29 Production of thin-film type gas detecting element

Country Status (1)

Country Link
JP (1) JPS5425896A (en)

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