JPS5425896A - Production of thin-film type gas detecting element - Google Patents
Production of thin-film type gas detecting elementInfo
- Publication number
- JPS5425896A JPS5425896A JP9187377A JP9187377A JPS5425896A JP S5425896 A JPS5425896 A JP S5425896A JP 9187377 A JP9187377 A JP 9187377A JP 9187377 A JP9187377 A JP 9187377A JP S5425896 A JPS5425896 A JP S5425896A
- Authority
- JP
- Japan
- Prior art keywords
- thin
- detecting element
- gas detecting
- production
- film type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To miniaturize and obtain a gas detecting element of the type of directly drawing out the resistance change of the low resistance region of a thin-film by forming the thin-film between resistance-drawing-out electrodes then forming lead-wire-mounting electrodes on said electrodes.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9187377A JPS5425896A (en) | 1977-07-29 | 1977-07-29 | Production of thin-film type gas detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9187377A JPS5425896A (en) | 1977-07-29 | 1977-07-29 | Production of thin-film type gas detecting element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5425896A true JPS5425896A (en) | 1979-02-27 |
Family
ID=14038668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9187377A Pending JPS5425896A (en) | 1977-07-29 | 1977-07-29 | Production of thin-film type gas detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5425896A (en) |
-
1977
- 1977-07-29 JP JP9187377A patent/JPS5425896A/en active Pending
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