JPS5424261B1 - - Google Patents
Info
- Publication number
- JPS5424261B1 JPS5424261B1 JP641270A JP641270A JPS5424261B1 JP S5424261 B1 JPS5424261 B1 JP S5424261B1 JP 641270 A JP641270 A JP 641270A JP 641270 A JP641270 A JP 641270A JP S5424261 B1 JPS5424261 B1 JP S5424261B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP641270A JPS5424261B1 (en) | 1970-01-23 | 1970-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP641270A JPS5424261B1 (en) | 1970-01-23 | 1970-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5424261B1 true JPS5424261B1 (en) | 1979-08-20 |
Family
ID=11637637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP641270A Pending JPS5424261B1 (en) | 1970-01-23 | 1970-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5424261B1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58137948A (en) * | 1982-02-10 | 1983-08-16 | Jeol Ltd | Method of adjusting focus of scanning electron microscope or the like |
| JP2013016370A (en) * | 2011-07-05 | 2013-01-24 | Jeol Ltd | Transmission electron microscope, defocus amount adjustment method of transmission electron microscope, program, and information storage medium |
| JP2018113171A (en) * | 2017-01-12 | 2018-07-19 | 日本電子株式会社 | Method for adjusting focus of charged particle beam apparatus, and charged particle beam apparatus |
-
1970
- 1970-01-23 JP JP641270A patent/JPS5424261B1/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58137948A (en) * | 1982-02-10 | 1983-08-16 | Jeol Ltd | Method of adjusting focus of scanning electron microscope or the like |
| JP2013016370A (en) * | 2011-07-05 | 2013-01-24 | Jeol Ltd | Transmission electron microscope, defocus amount adjustment method of transmission electron microscope, program, and information storage medium |
| JP2018113171A (en) * | 2017-01-12 | 2018-07-19 | 日本電子株式会社 | Method for adjusting focus of charged particle beam apparatus, and charged particle beam apparatus |