JPS5423556B2 - - Google Patents

Info

Publication number
JPS5423556B2
JPS5423556B2 JP12052572A JP12052572A JPS5423556B2 JP S5423556 B2 JPS5423556 B2 JP S5423556B2 JP 12052572 A JP12052572 A JP 12052572A JP 12052572 A JP12052572 A JP 12052572A JP S5423556 B2 JPS5423556 B2 JP S5423556B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12052572A
Other languages
Japanese (ja)
Other versions
JPS4978478A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12052572A priority Critical patent/JPS5423556B2/ja
Publication of JPS4978478A publication Critical patent/JPS4978478A/ja
Publication of JPS5423556B2 publication Critical patent/JPS5423556B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP12052572A 1972-11-30 1972-11-30 Expired JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12052572A JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-30 1972-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12052572A JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-30 1972-11-30

Publications (2)

Publication Number Publication Date
JPS4978478A JPS4978478A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-07-29
JPS5423556B2 true JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-08-14

Family

ID=14788402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12052572A Expired JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-30 1972-11-30

Country Status (1)

Country Link
JP (1) JPS5423556B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931543A (ja) * 1982-08-17 1984-02-20 Toshiba Corp シヤドウマスクの製造方法
JPS5968147A (ja) * 1982-10-08 1984-04-18 Toshiba Corp シヤドウマスクの製造方法
JPS5973833A (ja) * 1982-10-19 1984-04-26 Toshiba Corp シヤドウマスクの製造方法

Also Published As

Publication number Publication date
JPS4978478A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-07-29

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