JPS5423039A - Vapor phase plating process - Google Patents

Vapor phase plating process

Info

Publication number
JPS5423039A
JPS5423039A JP8791377A JP8791377A JPS5423039A JP S5423039 A JPS5423039 A JP S5423039A JP 8791377 A JP8791377 A JP 8791377A JP 8791377 A JP8791377 A JP 8791377A JP S5423039 A JPS5423039 A JP S5423039A
Authority
JP
Japan
Prior art keywords
vapor phase
plating process
phase plating
supplyign
reactorqarranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8791377A
Other languages
Japanese (ja)
Other versions
JPS6011104B2 (en
Inventor
Shigetaka Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8791377A priority Critical patent/JPS6011104B2/en
Publication of JPS5423039A publication Critical patent/JPS5423039A/en
Publication of JPS6011104B2 publication Critical patent/JPS6011104B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To efficiently form plate films of a uniform thickenss by providing a heating element in the center of a reactorqarranging mateirals to be plated inthe optimal reaction region of the reactor; and supplyign a vapor source to the periphery.
JP8791377A 1977-07-22 1977-07-22 Gas phase plating method Expired JPS6011104B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8791377A JPS6011104B2 (en) 1977-07-22 1977-07-22 Gas phase plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8791377A JPS6011104B2 (en) 1977-07-22 1977-07-22 Gas phase plating method

Publications (2)

Publication Number Publication Date
JPS5423039A true JPS5423039A (en) 1979-02-21
JPS6011104B2 JPS6011104B2 (en) 1985-03-23

Family

ID=13928149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8791377A Expired JPS6011104B2 (en) 1977-07-22 1977-07-22 Gas phase plating method

Country Status (1)

Country Link
JP (1) JPS6011104B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996033295A1 (en) * 1995-04-18 1996-10-24 Societe Europeenne De Propulsion Vapour phase chemical infiltration process for densifying porous substrates disposed in annular stacks

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996033295A1 (en) * 1995-04-18 1996-10-24 Societe Europeenne De Propulsion Vapour phase chemical infiltration process for densifying porous substrates disposed in annular stacks
FR2733254A1 (en) * 1995-04-18 1996-10-25 Europ Propulsion CHEMICAL VAPOR INFILTRATION PROCESS FOR THE DENSIFICATION OF POROUS SUBSTRATES DISPOSED IN RING STACKS
US5904957A (en) * 1995-04-18 1999-05-18 Societe Europeenne De Propulsion Vapour phase chemical infiltration process for densifying porous substrates disposed in annular stacks

Also Published As

Publication number Publication date
JPS6011104B2 (en) 1985-03-23

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