JPS5421711B2 - - Google Patents

Info

Publication number
JPS5421711B2
JPS5421711B2 JP776775A JP776775A JPS5421711B2 JP S5421711 B2 JPS5421711 B2 JP S5421711B2 JP 776775 A JP776775 A JP 776775A JP 776775 A JP776775 A JP 776775A JP S5421711 B2 JPS5421711 B2 JP S5421711B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP776775A
Other languages
Japanese (ja)
Other versions
JPS5188181A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP776775A priority Critical patent/JPS5421711B2/ja
Publication of JPS5188181A publication Critical patent/JPS5188181A/ja
Publication of JPS5421711B2 publication Critical patent/JPS5421711B2/ja
Expired legal-status Critical Current

Links

JP776775A 1975-01-20 1975-01-20 Expired JPS5421711B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP776775A JPS5421711B2 (en) 1975-01-20 1975-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP776775A JPS5421711B2 (en) 1975-01-20 1975-01-20

Publications (2)

Publication Number Publication Date
JPS5188181A JPS5188181A (en) 1976-08-02
JPS5421711B2 true JPS5421711B2 (en) 1979-08-01

Family

ID=11674819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP776775A Expired JPS5421711B2 (en) 1975-01-20 1975-01-20

Country Status (1)

Country Link
JP (1) JPS5421711B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1071579A (en) * 1976-09-13 1980-02-12 Northern Telecom Limited End point control in plasma etching
JPS5355471U (en) * 1976-10-13 1978-05-12
US4246060A (en) * 1979-01-02 1981-01-20 Motorola, Inc. Plasma development process controller
JPS5759332A (en) * 1980-09-27 1982-04-09 Fujitsu Ltd Method for detecting finishing time of dry etching reaction
JPS5839781A (en) * 1981-09-02 1983-03-08 Toshiba Corp Reactive ion etching device
JPS58140126A (en) * 1982-02-16 1983-08-19 Matsushita Electric Ind Co Ltd Dry etching method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (en) * 1972-04-18 1974-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492482A (en) * 1972-04-18 1974-01-10

Also Published As

Publication number Publication date
JPS5188181A (en) 1976-08-02

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