JPS5355471U - - Google Patents

Info

Publication number
JPS5355471U
JPS5355471U JP13665776U JP13665776U JPS5355471U JP S5355471 U JPS5355471 U JP S5355471U JP 13665776 U JP13665776 U JP 13665776U JP 13665776 U JP13665776 U JP 13665776U JP S5355471 U JPS5355471 U JP S5355471U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13665776U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13665776U priority Critical patent/JPS5355471U/ja
Publication of JPS5355471U publication Critical patent/JPS5355471U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP13665776U 1976-10-13 1976-10-13 Pending JPS5355471U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13665776U JPS5355471U (en) 1976-10-13 1976-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13665776U JPS5355471U (en) 1976-10-13 1976-10-13

Publications (1)

Publication Number Publication Date
JPS5355471U true JPS5355471U (en) 1978-05-12

Family

ID=28745525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13665776U Pending JPS5355471U (en) 1976-10-13 1976-10-13

Country Status (1)

Country Link
JP (1) JPS5355471U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5188181A (en) * 1975-01-20 1976-08-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5188181A (en) * 1975-01-20 1976-08-02

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