JPS5419748B2 - - Google Patents
Info
- Publication number
- JPS5419748B2 JPS5419748B2 JP12702675A JP12702675A JPS5419748B2 JP S5419748 B2 JPS5419748 B2 JP S5419748B2 JP 12702675 A JP12702675 A JP 12702675A JP 12702675 A JP12702675 A JP 12702675A JP S5419748 B2 JPS5419748 B2 JP S5419748B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12702675A JPS5250688A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of oriented pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12702675A JPS5250688A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of oriented pattern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5250688A JPS5250688A (en) | 1977-04-22 |
| JPS5419748B2 true JPS5419748B2 (de) | 1979-07-17 |
Family
ID=14949831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12702675A Granted JPS5250688A (en) | 1975-10-22 | 1975-10-22 | Checking device for defect of oriented pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5250688A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02723Y2 (de) * | 1984-05-16 | 1990-01-10 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2796316B2 (ja) * | 1988-10-24 | 1998-09-10 | 株式会社日立製作所 | 欠陥または異物の検査方法およびその装置 |
-
1975
- 1975-10-22 JP JP12702675A patent/JPS5250688A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02723Y2 (de) * | 1984-05-16 | 1990-01-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5250688A (en) | 1977-04-22 |