JPS5418989B2 - - Google Patents

Info

Publication number
JPS5418989B2
JPS5418989B2 JP12346275A JP12346275A JPS5418989B2 JP S5418989 B2 JPS5418989 B2 JP S5418989B2 JP 12346275 A JP12346275 A JP 12346275A JP 12346275 A JP12346275 A JP 12346275A JP S5418989 B2 JPS5418989 B2 JP S5418989B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12346275A
Other languages
Japanese (ja)
Other versions
JPS5247530A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12346275A priority Critical patent/JPS5247530A/ja
Publication of JPS5247530A publication Critical patent/JPS5247530A/ja
Publication of JPS5418989B2 publication Critical patent/JPS5418989B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12346275A 1975-10-14 1975-10-14 Vaporisation apparatus Granted JPS5247530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12346275A JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12346275A JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Publications (2)

Publication Number Publication Date
JPS5247530A JPS5247530A (en) 1977-04-15
JPS5418989B2 true JPS5418989B2 (enExample) 1979-07-11

Family

ID=14861218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12346275A Granted JPS5247530A (en) 1975-10-14 1975-10-14 Vaporisation apparatus

Country Status (1)

Country Link
JP (1) JPS5247530A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7754016B2 (en) 2002-10-07 2010-07-13 United Technologies Corporation Multiple axis tumbler coating apparatus
US6923868B2 (en) * 2003-09-23 2005-08-02 Gba S.A. Installation for electron-ray coatication of coatings
US7182814B1 (en) * 2005-08-12 2007-02-27 Hong-Cing Lin Sample holder for physical vapor deposition equipment

Also Published As

Publication number Publication date
JPS5247530A (en) 1977-04-15

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