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Priority to JP12294375ApriorityCriticalpatent/JPS5247582A/ja
Publication of JPS5247582ApublicationCriticalpatent/JPS5247582A/ja
Publication of JPS5418988B2publicationCriticalpatent/JPS5418988B2/ja
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/0021—Reactive sputtering or evaporation
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Chemical & Material Sciences
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Chemical Kinetics & Catalysis
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Engineering & Computer Science
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Materials Engineering
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Mechanical Engineering
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Metallurgy
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Organic Chemistry
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Physical Vapour Deposition
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JP12294375A1975-10-141975-10-14Acteivation and reactive vacuum evaporation method
GrantedJPS5247582A
(en)