JPS5418933B2 - - Google Patents
Info
- Publication number
- JPS5418933B2 JPS5418933B2 JP11029672A JP11029672A JPS5418933B2 JP S5418933 B2 JPS5418933 B2 JP S5418933B2 JP 11029672 A JP11029672 A JP 11029672A JP 11029672 A JP11029672 A JP 11029672A JP S5418933 B2 JPS5418933 B2 JP S5418933B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11029672A JPS5418933B2 (en:Method) | 1972-11-06 | 1972-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11029672A JPS5418933B2 (en:Method) | 1972-11-06 | 1972-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4968801A JPS4968801A (en:Method) | 1974-07-03 |
| JPS5418933B2 true JPS5418933B2 (en:Method) | 1979-07-11 |
Family
ID=14532085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11029672A Expired JPS5418933B2 (en:Method) | 1972-11-06 | 1972-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5418933B2 (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56101144A (en) * | 1980-01-16 | 1981-08-13 | Kimoto & Co Ltd | Photosensitive material and its developing method |
| JPS5741636A (en) * | 1980-08-27 | 1982-03-08 | Toshiba Corp | Photoresist composition |
| JPS57168248A (en) * | 1981-04-09 | 1982-10-16 | Kimoto & Co Ltd | Formation of image with nonsilver photoresist composition |
| KR980010618A (ko) * | 1996-07-16 | 1998-04-30 | 손욱 | 포토레지스트 조성물 |
-
1972
- 1972-11-06 JP JP11029672A patent/JPS5418933B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4968801A (en:Method) | 1974-07-03 |